Development of a Sinusoidal Corrugated Dual-Axial Flexure Mechanism for Planar Nanopositioning

Taking advantage of the concurrent stretching and bending property corrugated flexure hinges, a sinusoidal linkage was proposed applied for construction dual-axial mechanism with structural symmetry decoupled planar motion guidance. Castigliano’s second theorem employed to derive complete compliance basic unit, matrix-based modeling then find stiffness mechanism. Using established analytical models, influence parameters on both were investigated, further verification by finite element analysis, errors less than 20% compared results all cases. In addition, practically tested, its deviation between practical around 7.4%. Further, feasibility demonstrated successfully applying it magnetic nanopositioning stage, which open-loop closed-loop performances systematically examined. The stage has stroke 130 μm two axes maximum cross-talk 2.5%, natural frequency is 590 Hz.